Author:
Bolotnik N. N.,Gradetskii V. G.,Zhukov A. A.,Kozlov D. V.,Smirnov I. P.,Chashchukhin V. G.
Subject
Space and Planetary Science,Astronomy and Astrophysics,Aerospace Engineering
Reference31 articles.
1. Dario, P., Valleggi, R., Carrozza, M., et al., Microactuators for microrobots: A critical survey, J. Micromech. Microeng., 1992, vol. 2, no. 3, pp. 141–157.
2. The MEMS Handbook, Gad-el-Hak, M., Ed., Boca Raton: CRC Press, 2002.
3. Gradetskii, V.G., Knyaz’kov, M.M., Fomin, L.F., and Chashchukhin, V.G., Mekhanika miniatyurnykh robotov (Mechanics of Microrobots), Moscow: Nauka. 2010.
4. Madou, H.J., Fundamentals of Microfabrication. Science of Miniaturization, Boca Raton: CRC Press, 2002.
5. Norton, A., Evans, J., Gavel, D., et al., Preliminary characterization of Boston Micromachines’ 4096-actuator deformable mirror, Proc. SPIE
(MEMS Adaptive Optics III), 2009, vol. 7209, 72090I.
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献