SIMS diagnostics of the structure of nanometer-sized semiconducting layers doped with impurities-Reference-Cited by-同舟云学术

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SIMS diagnostics of the structure of nanometer-sized semiconducting layers doped with impurities

Published:2010-10 Issue:5 Volume:4 Page:784-787
ISSN:1027-4510
Container-title:Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
language:en
Short-container-title:J. Synch. Investig.

Author:

Pustovit A. N.

Publisher

Pleiades Publishing Ltd

Subject

Surfaces, Coatings and Films

Link

http://link.springer.com/content/pdf/10.1134/S1027451010050162.pdf

Reference7 articles.

1. A. N. Pustovit, in Proc. of the 16th Intern. Conf. on Interaction of Ions with Surface VIP-2003, Zvenigorod (ITTs MATI, Moscow, 2003), Vol. 1, p. 397.

2. A. N. Pustovit, Izv. Akad. Nauk, Ser. Fiz. 68, 397 (2004).

3. A. N. Pustovit and A. F. Vyatkin, SIMS XI (Wiley, Chichester, 1997), p. 281.

4. CirLin Eun-Hee, John J. Vigo, and T. C. Hasenberg, J. Vac. Sci. Technol. B 12, 269 (1994).

5. J. Cardenas and B. G. Svensson, SIMS XI (Wiley, Chichester, 1997), p. 335.

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