Multiple processes during the sputtering of materials by ion bombardment-Reference-Cited by-同舟云学术

Multiple processes during the sputtering of materials by ion bombardment

Published:2013-05 Issue:3 Volume:7 Page:557-561
ISSN:1027-4510
Container-title:Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
language:en
Short-container-title:J. Synch. Investig.

Author:

Oksengendler B. L.,Maksimov S. E.,Turaeva N. N.,Turaev N. Yu.

Publisher

Pleiades Publishing Ltd

Subject

Surfaces, Coatings and Films

Link

Reference25 articles.

2. M. P. Villard, J. Phys. (Paris) 8, 2 (1899).

3. Sputtering by Particle Bombardment, Ed. by R. Behrisch (Springer, Berlin, 1981, 1983; Moscow, Mir, 1984, 1986), Vols. 1, 2.

4. Fundamental and Applied Aspects of Solid Material Sputtering, Ed. by E. S. Mashkova (Mir, Moscow, 1989) [in Russian].

5. A. Wucher, Mat. Fys. Medd. Dan. Vidensk. Selsk. 52, 405 (2006).

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