Solar cells with a ZnO:Al passivation layer grown by atomic layer deposition

Author:

Tuzovskii V. K.,Gavrilov S. A.,Terashkevich I. M.

Publisher

Pleiades Publishing Ltd

Subject

Materials Chemistry,Metals and Alloys,Inorganic Chemistry,General Chemical Engineering

Reference5 articles.

1. Chang, W.L. et al., High performance monocrystalline silicon solar cells by using rear surface passivation of Al2O3/SiNx stack structure, 23rd European Photovoltaic Solar Energy Conf., Valencia, 2008, pp. 1349–1351.

2. Schmidt, J., Merkle, A., Bock, R., et al., Progress in the surface passivation of silicon solar cells, 23rd European Photovoltaic Solar Energy Conf., Valencia, 2008, pp. 974–981.

3. Kireev, V.Yu. and Stolyarov, A.A., Tekhnologii mikroelektroniki. Khimicheskoe osazhdenie iz gazovoi fazy (Microelectronics Technologies: Chemical Vapor Deposition), Moscow: Tekhnosfera, 2005.

4. Dimova-Malinovska, D., ZnO—an advanced material for solar cell, optoelectronic and sensor applications, Nanostruct. Adv. Mater., 2005, vol. 204, pp. 139–154.

5. Tuzovskii, V., Kravchenko, D., Buzdugan, A., and Kravchenko, A., ALD equipment and technologies from Beneq Oy, Nanoindustriya, 2009, no. 3, pp. 10–12.

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