Spectral measurements of the probability of recombination of active particles of plasma on solid surfaces in chlorine and its mixtures with inert and molecular gases-Reference-Cited by-同舟云学术

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Spectral measurements of the probability of recombination of active particles of plasma on solid surfaces in chlorine and its mixtures with inert and molecular gases

Published:2008-05-30 Issue:3 Volume:46 Page:301-305
ISSN:0018-151X
Container-title:High Temperature
language:en
Short-container-title:High Temp

Author:

Sitanov D. V.,Svettsov V. I.,Efremov A. M.

Publisher

Pleiades Publishing Ltd

Subject

General Engineering,Condensed Matter Physics

Link

http://link.springer.com/content/pdf/10.1134/S0018151X08030036.pdf

Reference14 articles.

1. Tsendin, L.D., Zh. Tekh. Fiz., 1985, vol. 55, no. 12, p. 2318.

2. Kirillov, Yu.V., Sitanov, D.V., and Svettsov, V.I., Khim. Vys. Energ., 2000, vol. 34, no. 3, p. 214.

3. Volynets, V.N., Slovetskii, D.I., Strochkov, A.Ya., and Trofimov, V.N., Zh. Prikl. Spektrosk., 1991, vol. 54, no. 6, p. 1004.

4. Kravchenko, Yu.S., Osadchuk, V.S., and Slovetskii, D.I., Khim. Vys. Energ., 1989, vol. 23, no. 6, p. 539.

5. Kirillov, Yu.V. and Sitanov, D.V., Khim. Vys. Energ., 2004, vol. 38, no. 3, p. 234.

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Kinetics of Atomic Recombination on Silicon Samples in Chlorine Plasma;Plasma Physics Reports;2018-08

2. Study of Gallium Arsenide Etching in a DC Discharge in Low-Pressure HCl-Containing Mixtures;Plasma Physics Reports;2017-10-06

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