1. Y. Suzuki, N. Iguchi, K. Adachi, A. Ichiki, T. Hioki, C.-W. Hsu, R. Sato, S. Kumagai, M. Sasaki, J.-H. Noh, Y. Sakurahara, K. Okabe, O. Takai, H. Honma, H. Watanabe, H. Sakoda, H. Sasagawa, H. Doy, S. Zhou, H. Hori, S. Nishikawa, T. Nozaki, N. Sugimoto, and T. Motohiro, Complete fabrication of a traversable 3 µm thick NbN film superconducting coil with Cu plated layer of 42 m in length in a spiral three-storied trench engraved in a Si wafer of 76.2 mm in diameter formed by MEMS technology for a compact SMES with high energy storage volume density, J. Phys.: Conf. Series, 2017, Vol. 897, P. 012019–1–012019–7.
2. N. Sugimoto, N. Iguchi, Y. Kusano, T. Fukano, T. Hioki, A. Ichiki, T. Bessho, and T. Motohiro, Compact SMES with a superconducting film in a spiral groove on a Si wafer formed by MEMS technology with possible high-energy storage volume density comparable to that of rechargeable batteries, Superconductor Sci. Technology, 2016, Vol. 30. No. 1, P. 015014–1–015014–11.
3. N. Sugimoto and T. Motohiro, Anisotropic I-V characteristics of spontaneously emerged periodic stripes of superconducting NbN thin films on Si trench sidewall by RF magnetron sputtering, Vacuum, 2013, Vol. 93, P. 13–21.
4. M.A. Vasyutin, N.D. Kuz’michev, and D.A. Shilkin, Simulation of the heat transfer process of superconducting films in the resistive state, Techn. Phys., 2021, Vol. 66, P. 524–527.
5. B.A. Gurovich, B.V. Goncharov, K.E. Prikhod’ko, L.V. Kutuzov, L.V. Stolyarov, and E.M. Malieva, Creation of thin films of NbN at room temperature of the substrate, Phys. Solid State, 2021, Vol. 63, Iss. 9, P. 1366–1368.