An Apparatus for Depositing Carbon Films in Magnetron Sputtering under Conditions of Photoactivation of a Film Surface
-
Published:2019-08-06
Issue:4
Volume:62
Page:568-572
-
ISSN:0020-4412
-
Container-title:Instruments and Experimental Techniques
-
language:en
-
Short-container-title:Instrum Exp Tech
Author:
Kostanovskiy A. V.,Pronkin A. A.,Zeodinov M. G.,Kostanovskaya M. E.
Publisher
Pleiades Publishing Ltd
Reference13 articles.
1. Jacob, W., Thin Solid Films, 1998, vol. 326, p. 1.
https://doi.org/10.1016/S0040-6090(98)00497-0 2. Rossi, F., André, B., Van Veen, A., Mijnarends, P.E., Schut, H., Delplancke, M.P., Gissler, W., Haupt, J., Lucazeau, G., and Abello, L., J. Appl. Phys., 1994, vol. 75, p. 3121.
https://doi.org/10.1063/1.356164 3. Collins, C.B., Davanloo, F., Jander, D.R., Lee, T.J., Park, H., and You, J.H., J. Appl. Phys., 1991, vol. 69, p. 7862.
https://doi.org/10.1063/1.347519 4. Polyynes: Synthesis, Properties, and Applications, Cataldo, F., Ed., Boca Raton, FL: CRC Press, 2006. 5. Kostanovskii, A.V., Zhilyakov, L.A., Pronkin, A.A., and Kirillin, A.V., Nanosyst., Nanomater.,
Nanotechnol., 2008, vol. 6, no. 3, p. 911.
|
|