Langmuir probe study of reactive magnetron discharge plasma in a three-component gas atmosphere
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Published:2016-11
Issue:6
Volume:59
Page:816-821
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ISSN:0020-4412
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Container-title:Instruments and Experimental Techniques
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language:en
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Short-container-title:Instrum Exp Tech
Author:
Evdokimov K. E.,Konishchev M. E.,Chzhilei S.,Pichugin V. F.
Publisher
Pleiades Publishing Ltd
Reference23 articles.
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