Modeling of certain nonuniform processes in semiconductor technology

Author:

Zon B. A.,Ledovskii S. B.,Likholet A. N.

Publisher

Pleiades Publishing Ltd

Subject

Physics and Astronomy (miscellaneous)

Reference15 articles.

1. Fundamentals of Silicon Integrated Device Technology. Vol. 1: Oxidation, Diffusion and Epitaxy, R. M. Burger and R. P. Donovan (Eds.) [Prentice Hall, New Jersey, (1967); Mir, Moscow (1969)].

2. J. M. Poate, K. N. Tu, and J. M. Mayer (Eds.), Thin Films — Interdiffusion and Reactions, [New Jersey (1978); Mir, Moscow (1982)].

3. S. P. Murarka, Silicides for VLSI Applications [Academic Press, New York (1983); Mir, Moscow (1986)].

4. V. P. Maslov, V. G. Danilov, and K. A. Volosov, Mathematical Modeling of Thermal Mass-Transfer Processes [in Russian], Nauka, Moscow, 1987.

5. R. S. Muller and T. I. Kamins, Device Electronics for Integrated Circuits [Wiley, New York (1986); Mir, Moscow (1989)].

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