High-Performance Large-Scale Atomistic Simulation of Thin Films Deposition
Author:
Publisher
Pleiades Publishing Ltd
Subject
General Mathematics
Link
https://link.springer.com/content/pdf/10.1134/S1995080222070137.pdf
Reference21 articles.
1. Some fundamentals of optical thin film growth;N. Kaiser,2003
2. H. A. Macleod, ‘‘Recent developments in deposition techniques for optical thin films and coatings,’’ in Optical Thin Films and Coatings: From Materials to Applications (Woodhead, Oxford, 2013), pp. 3–25.
3. J. R. McNeil, A. C. Barron, S. R. Wilson, and W. C. Herrmann, ‘‘Ion-assisted deposition of optical thin films: Low energy vs high energy bombardment,’’ Appl. Opt. 23, 552–559 (1984).
4. J.-W. Seong and D. Choi, ‘‘Effect of assisted ion energy on properties of silicon oxide thin film deposited by dual ion-beam sputtering,’’ J. Appl. Polym. Sci. 105, 2444–2452 (2007).
5. H. Niederwald, S. Laux, M. Kennedy, U. Schallenberg, A. Duparre, M. Mertin, N. Kaiser, and D. Ristau, ‘‘Ion-assisted deposition of oxide materials at room temperature by use of different ion sources,’’ Appl. Opt. 38, 3610–3613 (1999).
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