Possibility of nondestructive layer-by-layer analysis of multilayer structures of ultrathin films using low-energy hydrogen ions-Reference-Cited by-同舟云学术

Possibility of nondestructive layer-by-layer analysis of multilayer structures of ultrathin films using low-energy hydrogen ions

Published:1999-06 Issue:6 Volume:25 Page:442-443
ISSN:1063-7850
Container-title:Technical Physics Letters
language:en
Short-container-title:Tech. Phys. Lett.

Author:

Kurnaev V. A.,Trifonov N. N.,Drozdov M. N.,Salashchenko N. N.

Publisher

Pleiades Publishing Ltd

Subject

Physics and Astronomy (miscellaneous)

Link

http://link.springer.com/content/pdf/10.1134/1.1262510.pdf

Reference7 articles.

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2. A. Feurstein, H. Grahmann, S. Kabitzer, and H. Oestzman, Ion Beam Surface Layer Analysis, edited by O. Meyer, G. Linker, and F. Kappeler (Plenum Press, New York, 1975), p. 471.

3. N. N. Koborov, A. I. Kuzovlev, V. A. Kurnaev, V. S. Remizovich, and N. N. Trifonov, Nucl. Instrum. Methods Phys. Res. B 129, 5 (1977).

4. S. S. Andreev, A. D. Akhsakhalyan, M. N. Drozdov, N. I. Polushkin, and N. N. Salashenko, Thin Solid Films 263, 169 (1995).

5. M. N. Drozdov, S. S. Andreev, D. V. Masterov, N. N. Salashchenko, and E. A. Shamov, Poverkhnost’ 11, 57 (1997).

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