Influence of ion bombardment on residual stresses in diamond-like carbon films-Reference-Cited by-同舟云学术

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Influence of ion bombardment on residual stresses in diamond-like carbon films

Published:2009-04 Issue:2 Volume:3 Page:235-238
ISSN:1027-4510
Container-title:Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
language:en
Short-container-title:J. Synch. Investig.

Author:

Karasev P. A.,Podsvirov O. A.,Vinogradov A. Ya.,Azarov A. Yu.,Karasev N. N.,Smirnov A. S.,Titov A. I.,Korkin I. V.,Poplevkin S. V.

Publisher

Pleiades Publishing Ltd

Subject

Surfaces, Coatings and Films

Link

http://link.springer.com/content/pdf/10.1134/S1027451009020116.pdf

Reference14 articles.

1. Y. Lifshitz, Diamond Relat. Mater. 8, 1659 (1999).

2. J. Robertson, Thin Solid Films 296, 61 (1997).

3. K. K. Hirakuri, M. Yoshimura, and G. Friedbacher, Diamond Relat. Mater. 12, 1013 (2003).

4. S. E. Thompson, G. Sun, Y. S. Choi, and T. Nishida, IEEE Trans. Electron Devices 53, 1010 (2006).

5. E. Liu, B. Blanpain, X. Shi, et al., Surf. Coat. Technol. 106, 72 (1998).

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effect of ion bombardment on the phase composition and mechanical properties of diamond-like carbon films;Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques;2014-01

2. Residual stress in diamond-like carbon films: Role of growth conditions and ion irradiation;Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques;2010-04

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