Beryllium X-ray lithography templates-Reference-Cited by-同舟云学术

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Beryllium X-ray lithography templates

Published:2015-01 Issue:1 Volume:9 Page:53-61
ISSN:1027-4510
Container-title:Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
language:en
Short-container-title:J. Synch. Investig.

Author:

Gentselev A. N.,Goldenberg B. G.,Zelinsky A. G.,Lemzyakov A. G.

Publisher

Pleiades Publishing Ltd

Subject

Surfaces, Coatings and Films

Link

http://link.springer.com/content/pdf/10.1134/S1027451015010085.pdf

Reference15 articles.

1. S. B. Li, Preprint 90-125, Inst. Yad. Fiz. (IYaF SO AN SSSR, Novosibirsk, 1990).

2. LIGA-Technology and Its Application (Inst. Yad. Fiz. SO RAN, Novosibirsk, 1992) [in Russian].

3. A. N. Gentselev, B. G. Goldenberg, V. I. Kondrat’ev, et al., Poverkhnost’, No. 9, 30 (2002).

4. A. N. Gentselev, B. G. Goldenberg, A. D. Nikolenko, et al., J. Surf. Invest.: X-ray, Synchrotron Neutron Tech. 7, 691 (2013).

5. Yu. M. Aleksandrov, K. A. Valiev, L. V. Velikov, et al., Mikroelektronika 12, 10 (1983).

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Method for Manufacturing Silicon X-Ray Masks Via Plasma Chemical Etching;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2020-07

2. Fabrication of quasi-optical selective elements for the terahertz range in the form of pseudometallic structures via deep X-ray lithography;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2017-07

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