Influence of composition and molecular weight characteristics of methacrylic copolymers on their sensitivity to extreme ultraviolet radiation-Reference-Cited by-同舟云学术

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Influence of composition and molecular weight characteristics of methacrylic copolymers on their sensitivity to extreme ultraviolet radiation

Published:2008-06 Issue:3 Volume:2 Page:491-495
ISSN:1027-4510
Container-title:Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
language:en
Short-container-title:J. Synch. Investig.

Author:

Bulgakova S. A.,Ivanov I. P.,Lopatin A. Ya.,Mazanova L. M.

Publisher

Pleiades Publishing Ltd

Subject

Surfaces, Coatings and Films

Link

http://link.springer.com/content/pdf/10.1134/S1027451008030282.pdf

Reference13 articles.

1. G. K. Selivanov, D. D. Mozzhukhin, and B. G. Gribov, Mikroelektronika 9(6), 517 (1980).

2. Yu. S. Bokov, Electron. Prom-st., No. 1, 22 (1988).

3. W. Moreau, Microlitography, Part 1 (Mir, Moscow, 1990; Plenum, New York, 1988).

4. M. Ballauf and B. Wolf, Macromolecules 14, 654 (1981).

5. N. Viswanathan, J. Polym. Sci. Chem. Ed. 14, 1553 (1976).

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