Study of the Influence of Implanted Atoms on the Coefficients of the Sputtering of Silicon and Silicon with a Thin Oxide Film-Reference-Cited by-同舟云学术

Study of the Influence of Implanted Atoms on the Coefficients of the Sputtering of Silicon and Silicon with a Thin Oxide Film

Published:2018-09 Issue:5 Volume:12 Page:902-905
ISSN:1027-4510
Container-title:Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
language:en
Short-container-title:J. Synch. Investig.

Author:

Tashmukhamedova D. A.,Yusupjanova M. B.,Tashatov A. K.,Umirzakov B. E.

Publisher

Pleiades Publishing Ltd

Subject

Surfaces, Coatings and Films

Link

http://link.springer.com/content/pdf/10.1134/S1027451018050117.pdf

Reference12 articles.

1. S. B. Donaev, F. Djurabekova, D. A. Tashmukhamedova, and B. E. Umirzakov, Phys. Status Solidi C 12 (1–2), 89 (2015).

2. V. G. Lifshits, Electron Spectroscopy and Atomic Processes on Silicon Surface (Nauka, Moscow, 1985) [in Russian].

3. A. N. Mikhailov, D. V. Guseinov, A. I. Belov, A. B. Kostyuk, M. V. Karzanova, D. S. Korolev, A. O. Timofeeva, A. I. Bobrov, I. A. Chugrov, A. V. Ershov, A. P. Kasatkin, O. N. Gorshkov, D. A. Pavlov, E. S. Demidov, and D. I. Tetel’baum, in Proc. 21st Int. Conference “Interaction between Ions and Surface (VIP-2013)” (Yaroslavl, 2013), p. 31.

4. A. S. Lyutovich, Ion-Activated Films’ Crystallization (FAN, Tashkent, 1982) [in Russian].

5. B. E. Umirzakov, D. A. Tashmukhamedova, E. U. Boltaev, and A. A. Dzhurakhalov, Mater. Sci. Eng., B 101, 124 (2003).

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effect of Electron Bombardment on the Composition and Structure of CaF2/Si(111) Films;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2024-04

2. Epitaxial Growth of Ge Nanofilms on the Surface of SrF2;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2023-12

3. Impact of bombardment by Ar⁺, Na⁺ and O₂⁺ ions on spectra of elastically scattered electrons of single-crystal Ge;E3S Web of Conferences;2023

4. Study of the Composition of Uncontrolled Impurities and the Profiles of Their Distribution at the Ni–CdS Interface;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2022-10