Author:
Ivanova A. I.,Bleykher G. A.
Subject
Surfaces, Coatings and Films
Reference24 articles.
1. H. Ryssel and I. Ruge, Ion Implantation (Wiley, Chichester, 1986). https://doi.org/10.1002/sia.740100409
2. J. S. Williams and J. M. Poate, Ion Implantation and Beam Processing (Academic, Orlando, 1984).
3. F. F. Komarov, Phys.—Usp. 46, 1253 (2003). https://doi.org/10.1070/PU2003v046n12ABEH001286
4. H. Mehrer, Diffusion in Solids: Fundamentals, Methods, Materials, Diffusion-Controlled Processes (Springer, Berlin, 2007).
5. S. H. Valiev, T. S. Pugacheva, F. G. Jurabekova, S. A. Lem, and Y. Miyagawa, Nucl. Instrum. Methods Phys. Res., Sect. B. 127–128, 265 (1997). https://doi.org/10.1016/S0168-583X(96)00937-8