Analysis of the conditions underlying the formation of emitted atomic ion fluxes in the nonlinear collision-cascade mode of the sputtering of metals-Reference-Cited by-同舟云学术

Analysis of the conditions underlying the formation of emitted atomic ion fluxes in the nonlinear collision-cascade mode of the sputtering of metals

Published:2015-01 Issue:1 Volume:9 Page:172-177
ISSN:1027-4510
Container-title:Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
language:en
Short-container-title:J. Synch. Investig.

Author:

Belykh S. F.,Tolstogouzov A. B.,Lozovan A. A.,Aleshin M. E.,Elantyev I. A.

Publisher

Pleiades Publishing Ltd

Subject

Surfaces, Coatings and Films

Link

http://link.springer.com/content/pdf/10.1134/S102745101406024X.pdf

Reference35 articles.

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2. Sputtering by Particle Bombardment II, Ed. by R. Behrisch (Springer, Berlin, 1983).

3. Sputtering by Particle Bombardment III, Ed. by R. Behrisch and K. Wittmaack (Springer, Berlin, 1991).

4. Sputtering by Particle Bombardment: Experiments and Computer Calculations from Threshold to MeV Energies, Ed. by R. Behrisch and W. Eckstein (Springer, Berlin, 2007).

5. P. Sigmund, Phys. Rev. 184, 383 (1969).

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