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3. L. R. Doolittle, Nucl. Instrum. Methods Phys. Res. B 9, 344 (1985).
4. Handbook of Modern Ion Beam Materials Analysis, Ed. by J. S. Tesmer and M. Nastasi (MRS Publ., Pittsburg, 1995).
5. P. V. Novitskii and I. A. Zograf, Estimating Errors in Measurement Results (Energoatomizdat, Leningrad, 1991) [in Russian].