Application of a grid hollow cathode for substrate cleaning before vacuum deposition of coatings-Reference-Cited by-同舟云学术

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Application of a grid hollow cathode for substrate cleaning before vacuum deposition of coatings

Published:2008-06 Issue:3 Volume:2 Page:409-413
ISSN:1027-4510
Container-title:Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
language:en
Short-container-title:J. Synch. Investig.

Author:

Rogov A. V.,Lozovan A. A.

Publisher

Pleiades Publishing Ltd

Subject

Surfaces, Coatings and Films

Link

http://link.springer.com/content/pdf/10.1134/S1027451008030154.pdf

Reference6 articles.

1. N. V. Gavrilov and S. E. Romanov, Zh. Tekh. Fiz. 69(5), 20 (1999) [Tech. Phys. 44, 497 (1999)].

2. A. V. Rogov and K. Yu. Yukolov, Zh. Tekh. Fiz. 76(4), 109 (2006) [Tech. Phys. 51, 499 (2006)].

3. B. I. Moskalev, Discharge with a Hollow Cathode (Energiya, Moscow, 1969), p. 10 [in Russian].

4. B. S. Danilin, Low-Temperature Plasma Deposition of Thin Films (Energoatomizdat, Moscow, 1989), p. 59 [in Russian].

5. V. T. Barchenko, Yu. A. Bystrov, and E. A. Kolgin, Ion-Plasma Technologies in Electronic Production (Energoatomizdat, St. Petersburg, 2001), p. 31 [in Russian].

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A Discharge Cell that Combines a Magnetron and a Hollow Cathode for Cleaning Substrates and Subsequent Deposition of Coatings;Instruments and Experimental Techniques;2018-03

2. In situplasma cleaning of ITER diagnostic mirrors in noble-gas RF discharge;Physica Scripta;2017-11-29

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