1. L. Reimer, Scanning Electron Microscopy: Physics of Image Formation and Microanalysis (Springer, Berlin, 1998).
2. Yu. A. Novikov and A. V. Rakov, Russ. Microelectron. 25 (6), 368 (1996).
3. Yu. A. Novikov and A. V. Rakov, Meas. Tech. 42 (1), 20 (1999). https://doi.org/10.1007/BF02504195
4. M. T. Postek and A. E. Vladar, in Handbook of Silicon Semiconductor Metrology, Ed. by A. C. Diebold (Marcel Dekker, New York, 2001), p. 295.
5. Scanning Microscopy for Nanotechnology. Techniques and Applications, Ed. by W. Zhou and Z. L. Wang (Springer, New York, 2006).