Author:
Kudryavtsev A. A.,Tsendin L. D.
Subject
Physics and Astronomy (miscellaneous)
Reference21 articles.
1. M. Lieberman and A. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley, New York, 1994).
2. A. V. Rozhansky and L. D. Tsendin, Transport Phenomena in Partially Ionized Plasma (Taylor & Francis, London, 2001).
3. C. Lee and M. A. Lieberman, J. Vac. Sci. Technol. A 13(2), 368 (1995).
4. A. J. Lichtenberg, V. Vahedi, M. A. Lieberman, et al., J. Appl. Phys. 75, 2339 (1994).
5. G. Francis, Ionization Phenomena in Gases (Butterworths, London, 1960).
Cited by
13 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献