1. V. A. Labunov, I. L. Baranov, V. P. Bondarenko, and A. M. Dorofeev, Zarubezh. Elektron. Tekhn., No. 11 (270), 3 (1983).
2. S. V. Obolenskii, in Proceedings of the 31st International Conference on Physics of Interactions of Charged Particles with Crystals, Moscow, May 26–28, 2001 (Mosk. Gos. Univ., Moscow, 2001), p. 152.
3. V. N. Chernyaev, Physicochemical Processes in Electronic Technology (Vyssh. Shkola, Moscow, 1987) [in Russian].
4. V. S. Kamenkov, V. I. Semashko, and N. K. Tolochko, Vestn. VGU, No. 3 (57), 42 (2010).
5. O. D. Parfenov, Technology of Microschemes (Vyssh. Shkola, Moscow, 1989) [in Russian].