Ion Beams and X-ray Methods for the Planar Nanostructures Diagnostics
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Published:2023-12
Issue:S1
Volume:52
Page:S267-S273
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ISSN:1063-7397
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Container-title:Russian Microelectronics
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language:en
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Short-container-title:Russ Microelectron
Author:
Egorov V.,Egorov E.
Publisher
Pleiades Publishing Ltd
Reference14 articles.
1. Alford, T., Feldman, L.C., and Mayer, J.W., Fundamentals of Nanoscale Film Analysis, New York: Springer, 2007. https://doi.org/10.1007/978-0-387-29261-8 2. Johanson, S.A.E., Campbell, J.L., and Malquist, K.G., Particle Induced X-ray Emission Spectrometry (PIXE), New York: Wiley, 1995. 3. Klockenkamper, R. and von Bohlen, A., Total-Reflection X-ray Fluorescence Analysis and Related Methods, New York: Wiley, 1995. https://doi.org/10.1002/9781118985953 4. Van Grieken, R. and Markowicz, A., Handbook of X‑Ray Spectrometry, New York: CRC Press, 2001, 2nd ed. https://doi.org/10.1201/9780203908709 5. Egorov, V.K. and Egorov, E.V., TXRF spectrometry in conditions of planar x-ray waveguide-resonator applic-ation, 21st Century Nanoscience–A Handbook, Sattl-er, K.D., Ed., Boca Raton, Fla.: CRC Press, 2020, vol. 16, pp. 16.1–16.32. https://doi.org/10.1201/9780429340420-16
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