Features of the Manufacturing Process of Silicon Needles for Cantilevers
Author:
Publisher
Pleiades Publishing Ltd
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
https://link.springer.com/content/pdf/10.1134/S1063739722070071.pdf
Reference16 articles.
1. Burt, D.P., Dobson, P.S., Donaldson, L., and Weaver, J.M.R., A simple method for high yield fabrication of sharp silicon tips, Microelectron. Eng., 2008, vol. 85, no. 3, pp. 625–630. https://doi.org/10.1016/j.mee.2007.11.010
2. Wolter, O., Bayer, Th., and Greschner, J., Micromachined silicon sensors for scanning force microscopy, J. Vacuum Sci. Technol., 1990, vol. 9, no. 2, pp. 1353–1357. https://doi.org/10.1116/1.585195
3. Li, J., Xie, J., Xue, W., and Wu, D., Fabrication of cantilever with self-sharpening nano-silicon-tip for AFM applications, Microsyst. Technol., 2013, vol. 19, no. 2, pp. 285–290. https://doi.org/10.1007/s00542-012-1622-x
4. Zhang, X., Yu, X., Li, T., and Wang, Y., A novel method to fabricate silicon nanoprobe array with ultra-sharp tip on (111) silicon wafer, Microsyst. Technol., 2018, vol. 24, no. 7, pp. 2913–2917. https://doi.org/10.1007/s00542-017-3687-z
5. Han, J., Lu, S., Li, Q., Li, X., and Wang, J., Anisotropic wet etching silicon tips of small opening angle in KOH solution with the additions of I2/KI, Sens. Actuators, A, 2009, vol. 152, no. 1, pp. 75–79. https://doi.org/10.1016/j.sna.2009.03.008
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