MEMS Switch Based on a Cantilever with Increased Contact Force
Author:
Publisher
Pleiades Publishing Ltd
Link
https://link.springer.com/content/pdf/10.1134/S1063739723700774.pdf
Reference30 articles.
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2. Shekhar, S., Vinoy, K.J., and Ananthasuresh, G.K., Low-voltage high-reliability MEMS switch for millimeter wave 5G applications, J. Micromech. Microeng., 2018, vol. 28, no. 7, p. 075012. https://doi.org/10.1088/1361-6439/aaba3e
3. Haider, N., Caratelli, D., and Yarovoy, A.G., Recent developments in reconfigurable and multiband antenna technology, Int. J. Antennas Propag., 2013, vol. 2013, p. 869170. https://doi.org/10.1155/2013/869170
4. Daneshmand, M. and Mansour, R.R., RF MEMS satellite switch matrices, IEEE Microwave Mag., 2011, vol. 12, no. 5, pp. 92–109. https://doi.org/10.1109/mmm.2011.941417
5. Kurmendra, K.R., A review on RF micro-electro-mechanical-systems (MEMS) switch for radio frequency applications, Microsyst. Technol., 2021, vol. 27, no. 7, pp. 2525–2542. https://doi.org/10.1007/s00542-020-05025-y
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