Application of Al2O3 Film for Stabilization of the Charge Properties of the SiO2/p-Si Interface

Author:

Kim A. S.,Serko N. A.,Khakuashev P. E.,Kolky A. N.,Yurchuck S. Yu.

Publisher

Pleiades Publishing Ltd

Reference23 articles.

1. Kurnosov, A.I. and Yudin, V.V., Tekhnologiya proizvodstva poluprovodnikovykh priborov i integral’nykh skhem (Production Technology for Semiconductor Devices), Moscow: Vysshaya Shkola, 1979.

2. Manzha, N.M., Kokin, V.N., Chistyakov, Yu.D., and Patyukov, S.I., A method of manufacturing semiconducting devices with near-wall p-n-transitions, USSR Patent 1072666A1, 1996. https://patents.google.com/ patent/SU1072666A1/ru.

3. Budtolaev, A.K. and Liberova, G.V., A multi-element silicon p-i-n-photosensitive element, RF Patent no. 174468U1, 2017. https://yandex.ru/patents/doc/ RU174468U1_20171016.

4. Liberova, G.V. and Khakuashev, P.E., A multi-element silicon p-i-n-photodiode, RF Patent 181785U1, 2018. https://yandex.ru/patents/doc/RU181785U1_20180726.

5. Robertson, J., High dielectric constant gate oxides for metal oxide Si transistors, Rep. Prog. Phys., 2005, vol. 69, no. 2, pp. 327–396. https://doi.org/10.1088/0034-4885/69/2/R02

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