Author:
Rudnitsky A. S.,Serdyuk V. M.
Subject
Physics and Astronomy (miscellaneous)
Reference8 articles.
1. L. Brodie and J. Muray, The Physics of Microfabrication (Plenum, New York, 1982).
2. H. J. Levinson, Principles of Lithography (SPIE, Washington, 2010).
3. C. A. Mack, Fundamental Principles of Optical Lithography: The Science of Microfabrication (Wiley, London, 2007).
4. B. J. Lin, Optical Lithography: Here is Why (SPIE, Bellingham, 2010).
5. Manual Mask Aligner, http://www.suss.com/filead-min/user-upload/brochures/MA150e-Brochure.pdf