Ellipsometry as a high-precision technique for subnanometer-resolved monitoring of thin-film structures-Reference-Cited by-同舟云学术

Ellipsometry as a high-precision technique for subnanometer-resolved monitoring of thin-film structures

Published:2009-04 Issue:3-4 Volume:4 Page:201-214
ISSN:1995-0780
Container-title:Nanotechnologies in Russia
language:en
Short-container-title:Nanotechnol Russia

Author:

Shvets V. A.,Spesivtsev E. V.,Rykhlitskii S. V.,Mikhailov N. N.

Publisher

Pleiades Publishing Ltd

Subject

General Engineering,Condensed Matter Physics,General Materials Science

Link

http://link.springer.com/content/pdf/10.1134/S1995078009030082.pdf

Reference65 articles.

1. A. L. Aseev, Ross. Nanotekhnol. 1(1–2), 97 (2006).

2. A. V. Rzhanov, K. K. Svitashev, A. I. Semenenko, L. V. Semenenko, and V. K. Sokolov, Principles of Ellipsometry (Nauka, Novosibirsk, 1979) [in Russian].

3. R. Azzam and N. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977; Mir, Moscow, 1981).

4. P. Drude, Ann. Physik (Weinheim, Ger.) 32, 584 (1887).

5. P. Drude, Ann. Physik (Weinheim, Ger.) 34, 489 (1889).

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