Strength analysis of MEMS gyro elastic suspensions

Author:

Evstifeev M. I.,Rozentsvein D. V.,Chelpanov I. B.

Publisher

Pleiades Publishing Ltd

Subject

Electrical and Electronic Engineering,General Computer Science,Control and Systems Engineering

Reference12 articles.

1. Gai, E., Guiding Munitions with a Micromechanical INS/GPS System, Proc. of the 4th St. Petersburg Conference on Integrated Navigation Systems, St. Petersburg, 1998.

2. Peshekhonov, V.G. et al., Development and Test Results of a Micromechanical Disc-shape Gyroscope, Symposium Gyro Technology, 2005, pp. 8.0–8.10.

3. Peshekhonov, V.G. et al., Inertial Measurement Units on Micromechanical Sensors, IEEE A&E Systems Magazine, 2008, pp. 26–31.

4. Evstifeev, M.I., The Problems of Designing and Development of Micromechanical Gyroscopes, Gyroskopiya i Navigatsiya, 2004, no. 1, pp. 27–39.

5. RF Patent 18768(U1), Micromechanical Vibration Gyroscope, 2001.

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