Interference nanolithography with a UV laser-Reference-Cited by-同舟云学术

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Interference nanolithography with a UV laser

Published:2004-09 Issue:9 Volume:49 Page:1191-1195
ISSN:1063-7842
Container-title:Technical Physics
language:en
Short-container-title:Tech. Phys.

Author:

Bredikhin V. I.,Burenina V. N.,Verevkin Yu. K.,Kirsanov A. V.,Petryakov V. N.,Vostokov N. V.,Dryakhlushin V. F.,Klimov A. Yu.

Publisher

Pleiades Publishing Ltd

Subject

Physics and Astronomy (miscellaneous)

Link

http://link.springer.com/content/pdf/10.1134/1.1800241.pdf

Reference24 articles.

1. O. Beyer, I. Nee, F. Havermeyer, and K. Buse, Appl. Opt. 42, 30 (2003).

2. B. J. Egglet, IEEE J. Sel. Top. Quantum Electron. 7, 409 (2001).

3. L. Z. Cai and X. L. Yang, Opt. Laser Technol. 34, 671 (2002).

4. K. Kintaka, J. Nishii, and N. Tohge, Appl. Opt. 39, 489 (2000).

5. A. Fernandez, P. J. Bedrossian, S. L. Baker, et al., IEEE Trans. Magn. 32, 4472 (1996).

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