1. V. A. Bespalov, E. E. Gusev, N. A. Dyuzhev, et al., Nano-Mikrosist. Tekh. 24, 167 (2022).
2. A. A. Apriyana, Y. D.Lim, C. S. Tan, et al., IEEE Photonics J. 13, 1 (2021). https://doi.org/10.1109/group4.2019.8853904
3. S. V. Tarasov, A. N. Tsotsorin, I, V. Semeikon, et al., Elektron. Mikroelektron SVCh 1, 88 (2018).
4. L. Yan and G. Deepak, 3D Microelectronic Packaging From Architectures to Applications (Springer Nature, 2021), p. 49.
5. K. D. Munck, Dissertation (2008).