2,7,12-tri(4-trifluorovinyloxyphenyl)-5,5,10,10,15,15-hexa(4-trifluorovinyloxybenzyl)truxene for 22-nm nanolithography: Synthesis and thermo- and photochemical transformations
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Published:2011-10
Issue:2
Volume:440
Page:183-186
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ISSN:0012-5016
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Container-title:Doklady Physical Chemistry
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language:en
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Short-container-title:Dokl Phys Chem
Author:
Vainer A. Ya.,Dyumaev K. M.,Kovalenko A. M.,Davidovich M. Z.,Pinchuk E. M.,Sorokin V. Yu.
Publisher
Pleiades Publishing Ltd
Subject
Physical and Theoretical Chemistry
Reference15 articles.
1. Makushin, M., Elektronika. Nauka. Tekhnologiya. Biznes, 2010, no. 3, pp. 46–55. 2. Wurm, S., Solid State Technol., 2010, vol. 53, no. 2, pp. 16–18. 3. Fedynyshyn, T.H., Astolfi, D.K., Goodman, R.B., et al., J. Vac. Sci. Technol., 2008, vol. 26, no. 6, pp. 2281–2289. 4. Kozava, T., Tagava, S., Ohnishi, R., et al., Jpn. J. Appl. Phys., 2011, vol. 50, no. 1, pp. 016504–1-5. 5. Lawson, R.A., Noga, D.E., Younkin, T.R., et al., J. Vac. Sci. Technol., vol. 27, no. 6, pp. 2998–3003.
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