Magnetron technology of production of gradient optical coatings

Author:

Volpian O. D.,Kuzmichev A. I.,Obod Yu. A.

Publisher

Pleiades Publishing Ltd

Subject

General Engineering,General Materials Science

Reference12 articles.

1. Kuzmichev, A., Magnetronnye raspylitelnye sistemy (Magnetron Sputtering Systems), Kiev: Avers, p. 244.

2. Volpian, O.D., Kuzmichev, A.I., and Samokhish, A.S., Up-to-date optical film coatings, Elektronika Svyaz, 2008, no. 5, pp. 5–19.

3. Metamaterials: Theory, Design, Applications, Cui, T.J., Smith, D.R., and Liu, R., Eds., New York: Springer-Verlag, 2010.

4. Volpian, O.D., Kuzmichev, A.I., Obod, Yu.A., and Yakovlev, P.P., Magnetron technique of nanogradient optical coatings, Proc. 4th All-Russ. Conf. on Nanomaterials (NANO-2011), Moscow, 2011, Moscow: Inst. Metall. Mater. Sci. Russ. Acad. Sci., 2011, p. 233.

5. Chao, S., Chang, C.-K., and Chen, J.-S., TiO2-SiO2 mixed films prepared by the fast alternating sputter method, Appl. Opt., 1991, vol. 30, pp. 3233–3237.

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