Nanoelectromechanical (NEM) Devices for Logic and Memory Applications
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Published:2022-06-30
Issue:3
Volume:22
Page:188-197
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ISSN:1598-1657
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Container-title:JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE
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language:en
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Short-container-title:JSTS
Author:
Kwon Hyug-Su,Choi Woo-Young
Publisher
The Institute of Electronics Engineers of Korea
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials