Downscaling Study of Uncooled a-Si Infrared Microbolometer Cell based on Simulation
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Published:2020-02-29
Issue:1
Volume:20
Page:47-54
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ISSN:1598-1657
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Container-title:JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE
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language:en
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Short-container-title:JSTS
Author:
Jeong Jun-Kyo,Jeong Byeong-Jun,Oh Jae- Sub,Lee Ga-Won
Publisher
The Institute of Electronics Engineers of Korea
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials