Effect of Dissolved Oxygen and Oxygen Scavenger on the Etch Rate of Polysilicon
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Published:2020-02-29
Issue:1
Volume:20
Page:76-83
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ISSN:1598-1657
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Container-title:JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE
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language:en
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Short-container-title:JSTS
Author:
Lee Kyong-Ho,Cuong Tran Viet,Hong Chang-Hee
Publisher
The Institute of Electronics Engineers of Korea
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials