A Study on the Fluorine Effect of Direct Contact Process in High-Doped Boron Phosphorus Silicate Glass (BPSG)
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Published:2013-12-31
Issue:6
Volume:13
Page:662-667
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ISSN:1598-1657
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Container-title:JSTS:Journal of Semiconductor Technology and Science
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language:en
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Short-container-title:JSTS:Journal of Semiconductor Technology and Science
Author:
Kim Hyung-Joon,Choi Pyungho,Kim Kwangsoo,Choi Byoungdeog
Publisher
The Institute of Electronics Engineers of Korea
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials