Parameter Extraction Procedure for Ion Implantation Profiles to Establish Robust Database based on Tail Function
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Published:2010-12-31
Issue:4
Volume:10
Page:251-259
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ISSN:1598-1657
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Container-title:JSTS:Journal of Semiconductor Technology and Science
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language:en
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Short-container-title:JSTS:Journal of Semiconductor Technology and Science
Author:
Suzuki Kunihiro,Kojima Shuichi
Publisher
The Institute of Electronics Engineers of Korea
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials