Study on wet patterning of thin films in vertical-transfer wet station for thin-film-transistor manufacturing-Reference-Cited by-同舟云学术

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Study on wet patterning of thin films in vertical-transfer wet station for thin-film-transistor manufacturing

Published:2011 Issue:5 Volume:19 Page:380
ISSN:1071-0922
Container-title:Journal of the Society for Information Display
language:en
Short-container-title:J. Soc. Inf. Display

Author:

Lee Sang-Hyuk,Park In-Sun,Choe Hee Hwan,Hong Mun-Pyo,Seo Jong Hyun,Kim Pal-gon

Publisher

Wiley

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference8 articles.

1. P-21: Integrated Source Drivers for Electrophoretic Displays Using Low Temperature IZO TFTs

2. 56.4: Formation of Single-Layer Al-Alloy Interconnection for Source and Drain of a-Si TFT Using One-Wet-One-Dry Etching with Four-Mask Process

3. P-160: Ultra Simple White Organic Light-Emitting Diodes Using only Three Organic Materials

4. The Influence of Gate Insulator Etching on the Characteristics of Mo Tip Field Emitter Arrays

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Formation process and adjustment of the profile angle of Al–Mo composite electrodes in thin-film transistors for large-size premium displays;SCIENTIA SINICA Chimica;2023-09-04

2. Study on Wet Chemical Etching of Flexible Printed Circuit Board with 16-μm Line Pitch;Journal of Electronic Materials;2023-04-07

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