Structure of hydrogen center in D-implanted Si
Author:
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevB.18.2066/fulltext
Reference28 articles.
1. Amorphous Silicon: A New Direction for Semiconductors
2. Chemically Bound Hydrogen in CVD Si3 N 4: Dependence on NH 3 / SiH4 Ratio and on Annealing
3. Optical and photoconductive properties of discharge‐produced amorphous silicon
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