Dynamics of zirconium oxide thin-film growth and ion-beam etching
Author:
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevB.35.2934/fulltext
Reference28 articles.
1. Role of ions in ion-based film formation
2. Ion-based methods for optical thin film deposition
3. Ion-beam-assisted deposition of thin films
4. Protective dielectric coatings produced by ion-assisted deposition
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