Formation of nanoripples in Al films duringO2+sputtering
Author:
Publisher
American Physical Society (APS)
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevB.74.155427/fulltext
Reference27 articles.
1. Theory of ripple topography induced by ion bombardment
2. Morphology of ion-sputtered surfaces
3. Evolution of surface topography of fused silica by ion beam sputtering
4. Spontaneous formation of patterns on sputtered surfaces
5. Nanoscale periodic and faceted structures formation on Si(100) by oblique angle oxygen ion sputtering
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