Elastic differential cross sections for electron scattering fromSF6andCS2
Author:
Publisher
American Physical Society (APS)
Subject
Atomic and Molecular Physics, and Optics
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevA.79.012702/fulltext
Reference30 articles.
1. Electron collision cross-section data for plasma modeling
2. Experimental SF6−/SF6andCl−/CFCl3Electron-Attachment Cross Sections in the Energy Range 0-200 meV
3. 1-µm MOS process using anisotropic dry etching
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