Positive-Ion Bombardment of Germanium and Silicon
Author:
Publisher
American Physical Society (APS)
Subject
General Physics and Astronomy
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRev.108.1131/fulltext
Reference10 articles.
1. Kathodenzerstäubung bei sehr geringen Gasdrücken
2. Bombardment of Various Elements by Hg+and A+Ions
3. Controlled Sputtering of Metals by Low-Energy Hg Ions
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1. Review Article: Tracing the recorded history of thin-film sputter deposition: From the 1800s to 2017;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2017-09
2. Vacuum microbalance for determining sputtering yields operable in the vicinity of a magnetically confined, low‐pressure arc discharge;Journal of Vacuum Science and Technology;1976-01
3. Scattering of Metastable Molecules from a Gas-Covered (100) Surface of Germanium;Journal of Vacuum Science and Technology;1973-01
4. Adsorption anisotropy in layer chalcogenides;Journal of Physics C: Solid State Physics;1972-08-07
5. Lattice defects and surface properties of clean germanium;Surface Science;1967-02
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