Annealing reduces <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline" overflow="scroll"><mml:msub><mml:mi>Si</mml:mi><mml:mn>3</mml:mn></mml:msub><mml:msub><mml:mi mathvariant="normal">N</mml:mi><mml:mn>4</mml:mn></mml:msub></mml:math> microwave-frequency dielectric loss in superconducting resonators-Reference-Cited by-同舟云学术

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Annealing reduces Si3N4 microwave-frequency dielectric loss in superconducting resonators

Published:2024-05-22 Issue:5 Volume:21 Page:
ISSN:2331-7019
Container-title:Physical Review Applied
language:en
Short-container-title:Phys. Rev. Applied

Author:

Mittal S.¹²^ORCID,Adachi K.¹²^ORCID,Frattini N.E.¹²^ORCID,Urmey M.D.¹²^ORCID,Lin S-X.¹²^ORCID,Emser A.L.¹²^ORCID,Metzger C.¹²^ORCID,Talamo L.G.¹²^ORCID,Dickson S.¹²^ORCID,Carlson D.²³^ORCID,Papp S.B.²⁴,Regal C.A.¹²^ORCID,Lehnert K.W.¹²^ORCID

Affiliation:

1. JILA, National Institute of Standards and Technology and the University of Colorado, Boulder, Colorado 80309, USA

2. Department of Physics, University of Colorado, Boulder, Colorado 80309, USA

3. Octave Photonics, LLC., Boulder, Colorado 80305, USA

4. Time and Frequency Division, National Institute of Standards and Technology, Boulder, Colorado 80305, USA

Funder

ARO

NSF

Office of the Secretary of Defense

Publisher

American Physical Society (APS)

Link

http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevApplied.21.054044/fulltext

Reference51 articles.

1. Review—Silicon Nitride and Silicon Nitride-Rich Thin Film Technologies: State-of-the-Art Processing Technologies, Properties, and Applications

2. A review on RF micro-electro-mechanical-systems (MEMS) switch for radio frequency applications

3. Review of superconducting transition-edge sensors for x-ray and gamma-ray spectroscopy

4. Strong dispersive coupling of a high-finesse cavity to a micromechanical membrane

5. Silicon nitride membrane resonators at millikelvin temperatures with quality factors exceeding 108

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