Comparative study of elastic electron collisions on the isoelectronicSiN2,SiCO, andCSiOradicals-Reference-Cited by-同舟云学术

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Comparative study of elastic electron collisions on the isoelectronicSiN2,SiCO, andCSiOradicals

Published:2007-07-17 Issue:1 Volume:76 Page:
ISSN:1050-2947
Container-title:Physical Review A
language:en
Short-container-title:Phys. Rev. A

Author:

Fujimoto M. M.,Michelin S. E.,Mazon K. T.,Santos A. M.,Oliveira H. L.,Lee M.-T.

Publisher

American Physical Society (APS)

Subject

Atomic and Molecular Physics, and Optics

Link

http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevA.76.012709/fulltext

Reference38 articles.

1. The Preparation and Properties of Thin Film Silicon-Nitrogen Compounds Produced by a Radio Frequency Glow Discharge Reaction

2. Reactive Plasma Deposited Si‐N Films for MOS‐LSI Passivation

3. Effects of Nitride Deposition Conditions on Characteristics of an MNOS Nonvolatile Memory Transistor

4. Deep Trap States in Si3N4Layer on Si Substrate

5. Amorphous silicon‐silicon nitride thin‐film transistors

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Thermodynamic and transport properties of reacting air including ablated species;Hypersonic Meteoroid Entry Physics;2019

2. Thermodynamic and transport properties of plasmas including silicon-based compounds;Plasma Sources Science and Technology;2018-01-03

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