Absolute TiN(111) Step Energies from Analysis of Anisotropic Island Shape Fluctuations
Author:
Publisher
American Physical Society (APS)
Subject
General Physics and Astronomy
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevLett.88.146101/fulltext
Reference22 articles.
1. Multiscale Modeling of Thin-Film Deposition: Applications to Si Device Processing
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