Ultimate Efficiency of Extreme Ultraviolet Radiation from a Laser-Produced Plasma
Author:
Publisher
American Physical Society (APS)
Subject
General Physics and Astronomy
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevLett.94.015004/fulltext
Reference17 articles.
1. Experimental Indications of Plasma Instabilities Induced by Laser Heating
2. X‐ray emission measurements from CO2‐laser‐created plasmas
3. Repetitively pulsed-plasma soft x-ray source
4. X-Ray Lithography Using A KrF Laser-Produced Plasma
Cited by 62 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Fast diffraction model of lithography mask based on improved pixel-to-pixel generative adversarial network;Optics Express;2023-07-11
2. Characteristics of extreme ultraviolet emission from Gd plasma produced by dual pulse laser;Acta Physica Sinica;2022
3. Analysis of extreme ultraviolet spectra of laser-produced Cd plasmas*;Chinese Physics B;2020-07-01
4. Physics of laser-driven tin plasma sources of EUV radiation for nanolithography;Plasma Sources Science and Technology;2019-08-01
5. Spectroscopy of highly charged ions for extreme ultraviolet lithography;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2017-10
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3