Persistent Sputtering Yield Reduction in Plasma-Infused Foams
Author:
Funder
Air Force Office of Scientific Research
National Defense Science and Engineering
Publisher
American Physical Society (APS)
Subject
General Physics and Astronomy
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevLett.126.035001/fulltext
Reference21 articles.
1. Sheaths: More complicated than you think
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4. View factor modeling of sputter-deposition on micron-scale-architectured surfaces exposed to plasma
5. Cone Formation on Metal Targets during Sputtering
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