Amorphization processes in electron and/or ion-irradiated silicon
Author:
Publisher
American Physical Society (APS)
Subject
General Physics and Astronomy
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevLett.58.900/fulltext
Reference22 articles.
1. Relation of neutron to ion damage annealing in Si and Ge
2. Crystalline to amorphous transformation in ion‐implanted silicon: a composite model
3. Ion implantation of Si by12C,29Si, and120Sn: Amorphization and annealing effects
4. Ion-induced defects in semiconductors
5. The dynamic observation of the formation of defects in silicon under electron and proton irradiation
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